Tungsten hexacarbonyl

Description

1. Product Overview
Tungsten hexacarbonyl (W(CO)₆) is a high-purity organometallic precursor essential for chemical vapor deposition (CVD) and atomic layer deposition (ALD) of tungsten-based thin films. Its primary industrial use lies in semiconductor fabrication, protective coatings, and catalytic applications requiring conformal, high-density tungsten layers. The key value proposition is exceptional thermal stability combined with clean decomposition at moderate temperatures, enabling defect-free metallization. Strategically, it is critical as advanced nodes (sub-5nm) and EUV lithography drive demand for ultra-pure, low-resistivity tungsten interconnects and diffusion barriers.

2. Key Specifications & Technical Characteristics

• Chemical composition: Tungsten hexacarbonyl, W(CO)₆, ≥99.99% metals basis

• Purity grade: Electronic grade (99.99% – 99.999%) / Research grade (99.9%)

• Physical characteristics:

  • Form: Crystalline powder

  • Color: Colorless to pale cream

  • Particle size: 20–200 µm (customizable)

  • Density: 2.65 g/cm³ at 20°C

  • Sublimation point: 150°C at 1 atm

• Packaging options:

  • Stainless steel bubblers (100g, 500g, 1kg) with inert gas purge

  • Double-sealed, antistatic aluminum-lined bags (1kg, 5kg)

  • Custom ISO cleanroom packaging for semiconductor fabs

• Shelf life: 24 months when stored below 25°C in dry, inert atmosphere (argon or nitrogen)

3. Core Industrial Applications

• Semiconductors & microelectronics – Tungsten CVD for via fill, gate electrodes, and contact plugs. Superior to WF₆ due to zero fluorine contamination, eliminating interfacial corrosion and reducing device leakage.

• Protective hard coatings – Applied via thermal or plasma-enhanced CVD on cutting tools, turbine blades, and aerospace alloys. Outperforms chromium-based coatings in oxidation resistance (up to 500°C) and adhesion strength.

• Catalysis – Homogeneous and heterogeneous catalysts for olefin metathesis and hydrogenation. Provides higher turnover frequency than molybdenum or chromium carbonyl analogs.

• Nanomaterials synthesis – Decomposed to form tungsten carbide or tungsten nanoparticles for battery anodes and hydrogen evolution reaction electrodes.

4. Competitive Advantages

• Quality consistency – Batch-to-batch purity verified by ICP-MS, FTIR, and DSC; CO impurity <0.1% via thermal gravimetric analysis.

• Supply reliability – Dedicated synthesis lines with 4-week lead time for standard grades; 8-week for ultrapure electronic grade.

• Logistics capability – Global distribution hubs (NA, EU, APAC) with real-time temperature/humidity monitored shipping.

• Price competitiveness – Volume discounts exceeding 25% at 50kg+; lower cost per wafer compared to fluorine-based alternatives due to reduced post-deposition cleaning.

• Sustainability – Closed-loop CO recovery in manufacturing; recyclable stainless steel bubblers available.

• Technical support – Full SDS, COA, handling protocols, CVD process optimization guides, and 24/7 application engineering.

5. Commercial & Supply Information

• Minimum order quantity (MOQ): 100g (research grade) / 1kg (industrial grade)

• Bulk 20MT loading capacity: Not applicable — Tungsten hexacarbonyl is supplied in high-value, low-volume packaging due to its density and hazardous material classification. Maximum container loading for consolidated shipment:

  • 20-ft container (temperature-controlled): 6,000 kg net (palletized, UN class 4.1, PG II)

  • Drum size: 25kg net fiber drums with UN certification

  • Note: Bulk 20MT is not feasible given product density; for very large contracts (≥2,000 kg), dedicated ISO tank containers with inert atmosphere can be arranged.