Octafluorocyclobutane (C₄F₈) – semiconductor etch gas

Description

1. Product Overview

Octafluorocyclobutane (C₄F₈) is a high-purity fluorocarbon gas engineered for precision plasma etching processes in advanced semiconductor manufacturing. It is primarily used in dielectric and silicon-based etching, where controlled anisotropy and high selectivity are critical. The product delivers exceptional process stability, enabling consistent feature definition at nanoscale geometries. As device architectures continue to shrink, C₄F₈ has become strategically indispensable for next-generation microelectronics, supporting high-yield fabrication and process reproducibility in leading-edge fabs.

2. Key Specifications & Technical Characteristics

• Chemical Composition: Perfluorinated cyclic compound (C₄F₈)
• Purity Level / Grade: ≥ 99.99% (Electronic Grade); higher purities available upon request
• Physical Characteristics:
  • Form: Compressed liquefied gas
  • Color: Colorless
  • Odor: Slightly sweet
  • Molecular Weight: 200.03 g/mol
  • Density: ~8.4 kg/m³ (gas at standard conditions)
• Moisture Content: ≤ 5 ppm (typical for semiconductor grade)
• Packaging Options:
  • High-pressure steel cylinders (40L, 47L)
  • ISO tanks for bulk supply
  • Tube trailers for large-volume delivery
• Shelf Life: Stable under recommended storage conditions; no significant degradation over extended periods

3. Core Industrial Applications

• Primary Industries:
  • Semiconductor fabrication (IC manufacturing, MEMS)
  • Flat panel display (FPD) production
  • Photovoltaic cell manufacturing
• Operational Use Cases:
  • Plasma etching of silicon dioxide (SiO₂) and low-k dielectrics
  • Deep reactive ion etching (DRIE) processes
  • Sidewall passivation in high-aspect-ratio etching
• Performance Advantages:
  • Enables superior anisotropic etching with precise profile control
  • High selectivity over photoresist and underlying layers
  • Reduced polymer deposition compared to alternative fluorocarbons
  • Enhances process repeatability and throughput efficiency

4. Competitive Advantages

• Quality Consistency: Ultra-high purity standards ensure minimal contamination and defect rates
• Supply Reliability: Robust global sourcing network with redundant production capabilities
• Logistics Capability: Flexible delivery formats with optimized handling for semiconductor fabs
• Price Competitiveness: Scalable production enabling cost efficiencies for high-volume buyers
• Sustainability: Optimized production processes with reduced emissions and compliance with environmental regulations
• Technical Support: Comprehensive documentation (CoA, SDS) and process optimization support available

5. Commercial & Supply Information

• Minimum Order Quantity (MOQ): BULK 20 MT
• Loading Capacity:
  • Approx. 20–22 MT per ISO tank container
  • Customizable based on packaging configuration and destination logistics