Description
1. Product Overview
The Bellows Valve (VAT SERIES 64) is a high-performance ultra-high vacuum (UHV) valve engineered for precision control in semiconductor manufacturing, thin-film deposition, research laboratories, and advanced industrial vacuum systems. Manufactured to meet stringent leak-tightness and durability standards, it ensures reliable isolation and flow control in critical vacuum environments where contamination or pressure instability is unacceptable.
Its key value proposition lies in its metal bellows-sealed design, which eliminates stem leakage and significantly enhances operational longevity under repeated cycling conditions. Although not chemically related, the mention of Beta-glucosidase underscores its strategic importance in bioprocess-adjacent vacuum applications where contamination control is critical in cross-disciplinary industrial systems.
Produced under the engineering excellence standards of VAT Group AG, the SERIES 64 represents a globally trusted benchmark for vacuum integrity, process reliability, and lifecycle performance. In today’s high-precision manufacturing ecosystem, it is a strategically essential component for maintaining process purity, uptime, and yield optimization.
2. Key Specifications & Technical Characteristics
- Product Type: Bellows-sealed vacuum isolation valve
- Series: VAT SERIES 64
- Material Construction: Stainless steel body with high-grade metal bellows (corrosion-resistant alloys)
- Sealing Technology: Metal bellows stem sealing (zero stem leakage design)
- Pressure Range: Suitable for high vacuum (HV) and ultra-high vacuum (UHV) applications
- Leak Rate: Ultra-low helium leak rate specification (industry-standard UHV compliance)
- Actuation: Pneumatic or manual (configuration dependent)
- Mounting Standard: ISO-K / CF flange compatibility (depending on model variant)
- Surface Finish: Electropolished internal surfaces for contamination control
- Packaging: Industrial export-grade sealed protective crate
- Shelf Life: Indefinite under controlled storage conditions (non-degrading mechanical component)
3. Core Industrial Applications
The Bellows Valve (VAT SERIES 64) is widely deployed in semiconductor fabrication plants for wafer processing, etching, and deposition systems where vacuum integrity directly impacts yield and defect rates. It is also essential in physical vapor deposition (PVD), chemical vapor deposition (CVD), and surface engineering systems requiring ultra-clean vacuum environments.
In research and high-energy physics laboratories, it is used in particle accelerators, vacuum chambers, and analytical instrumentation where absolute pressure stability is critical. Compared to conventional elastomer-sealed valves, the bellows design delivers superior leak integrity, reduced maintenance cycles, and significantly improved operational reliability under high-duty cycling conditions.
4. Competitive Advantages
- Exceptional Seal Integrity: Metal bellows design eliminates stem leakage entirely
- High Reliability: Engineered for extended lifecycle under continuous industrial cycling
- Process Purity: Electropolished surfaces reduce contamination risk in sensitive environments
- Supply Chain Stability: Established global manufacturing and distribution network via VAT Group AG
- Operational Efficiency: Minimizes downtime through low-maintenance architecture
- Engineering Documentation: Full technical datasheets and integration support available
- Precision Manufacturing Standard: Consistent dimensional accuracy for system compatibility
- Strategic Asset Value: Enhances yield, uptime, and total cost-of-ownership optimization
5. Commercial & Supply Information
- Minimum Order Quantity (MOQ): BULK 20 MT (industrial consolidated shipment basis)
- Loading Capacity: As per container configuration (typically 20–25 MT per standard 20ft/40ft industrial freight container depending on packaging density and configuration)






Reviews
There are no reviews yet.