Rotary Stages (THK RU)

Description

1. Product Overview

The THK RU Rotary Stages are precision-engineered, cross-roller bearing-based rotary positioning devices designed for high-load, direct-drive applications requiring exceptional rotational accuracy. Primarily used in semiconductor manufacturing, precision metrology, and automated inspection systems, these stages deliver zero-backlash operation with unmatched stiffness and compact integration. In an industrial landscape demanding micron-level positioning and maximum uptime, the THK RU series represents a strategic differentiator—reducing motion errors while enabling higher throughput in mission-critical production lines.

2. Key Specifications & Technical Characteristics

• Material Components: High-carbon chromium bearing steel (SUJ2) for raceways; aluminum alloy housing with proprietary surface hardening; cross-roller retainer made from engineering plastic for reduced friction

• Accuracy Grade: P0 (standard), P4, P5, P6 per JIS B 1514; rotational runout from ±0.5 µm to ±5 µm depending on model

• Physical Characteristics: Outer diameter range: 70 mm – 600 mm; axial height compact from 12 mm to 45 mm; mass per unit: 0.5 kg – 35 kg; black oxide or electroless nickel finish options

• Packaging Options: Cleanroom-ready double vacuum-sealed anti-rust packaging; individual foam-cushioned industrial cartons; palletized bulk packaging for OEM quantities

• Shelf Life & Storage: 24 months in unopened original packaging (temperature: -20°C to 50°C, humidity <70% non-condensing)

3. Core Industrial Applications

• Semiconductor Wafer Inspection & Lithography – Provides <1 arc-second positioning repeatability for wafer alignment stages, outperforming worm-gear rotary tables by eliminating backlash-induced overlay errors.

• Automated Optical Inspection (AOI) & 3D Metrology – Enables high-speed, continuous 360° part rotation with minimal axial runout, increasing measurement throughput by up to 30% compared to conventional bearing stacks.

• Precision Laser Processing & Micromachining – Direct-drive compatibility delivers instantaneous acceleration/deceleration for scribing, drilling, and trimming, with zero maintenance intervals exceeding 20,000 operating hours.

• Medical Device Assembly & Robotic Wrist Joints – Hollow bore design (up to 60 mm ID) allows cabling and tubing to pass through, reducing cable drag failure by 80% versus side-cabled alternatives.

4. Competitive Advantages

• Quality Consistency – Factory-assembled and laser-interferometer verified with individual test reports; ≤2% coefficient of variation in torque ripple across production lots

• Supply Reliability – Backed by THK’s global stockholding network; 98% order fulfillment within 5 working days for standard models via bonded warehouses in Asia, EU, and North America

• Logistics Capability – Multimodal shipping (air, sea, rail) with real-time tracking; end-user labeling and customs documentation included for cross-border procurement

• Price Competitiveness – Tier-1 performance at 15–25% lower total landed cost than equivalent Japanese or German precision rotary stages due to optimized high-volume forging processes

• Sustainability & Support – ISO 14001-certified production with 100% recyclable packaging; 24/7 technical application engineering and 3D CAD model library available for direct integration

5. Commercial & Supply Information

• Minimum Order Quantity (MOQ): BULK 20MT
  (Equivalent to approximately 4,000–8,000 units depending on model size distribution)

• Loading Capacity (MT per container):

  • 20-ft standard dry container: 20 MT max (optimized pallet configuration)

  • 40-ft high cube container: 25 MT max for mixed SKU orders