Hexamethyldisilazane (HMDS)

Description

1. Product Overview
Hexamethyldisilazane (HMDS) is a high-purity organosilicon compound used primarily as a surface adhesion promoter and silylating agent in advanced semiconductor manufacturing, pharmaceutical synthesis, and specialty chemical production. Its key value proposition lies in its ability to selectively hydrophobize surfaces—reducing photoresist lifting and moisture uptake while enhancing process yield. As semiconductor geometries shrink below 10nm and pharmaceutical purity standards tighten globally, HMDS has become a strategically critical reagent for ensuring wafer-level uniformity and anhydrous reaction control.

2. Key Specifications & Technical Characteristics

• Chemical composition: (CH₃)₃Si–NH–Si(CH₃)₃; CAS 999-97-3

• Purity grade: Semiconductor grade (≥99.9%) / Technical grade (≥99.0%)

• Physical form: Transparent, colorless liquid

• Key impurities (max): Chloride (≤10 ppm), Ammonia (≤20 ppm), Metals (each ≤0.1 ppm for semiconductor grade)

• Density: 0.770 g/mL at 20°C

• Refractive index: n²⁰/D 1.408

• Boiling point: 125–126°C

• Packaging options: 200L nitrogen-purged stainless steel drums, 1000L IBCs, 20L fluorinated HDPE canisters

• Shelf life: 24 months when stored below 30°C in sealed, dry conditions

3. Core Industrial Applications

• Semiconductors & microelectronics: Primarily used as a primer for photoresist adhesion on silicon wafers (HMDS vapor prime process). Outperforms conventional adhesion promoters by eliminating particulate residues and reducing defect densities by up to 40% in sub-20nm nodes.

• Pharmaceutical synthesis: As a selective silylating agent to protect amine and hydroxyl groups in β-lactam antibiotics (e.g., amoxicillin intermediates) and steroid derivatives. Enables higher reaction yields (≥95%) versus TMS-Cl due to neutral byproduct (ammonia) and easier workup.

• Specialty coatings & sealants: Used to hydrophobize silica fillers and pyrogenic silica in high-performance polysiloxane sealants. Improves tensile strength by 15–20% and reduces moisture absorption compared to untreated silicas.

• Analytical chemistry: Derivatization reagent for GC-MS analysis of polar compounds (steroids, catecholamines) – superior to BSTFA in cost per reaction for routine high-throughput labs.

4. Competitive Advantages

• Quality consistency: ISO 9001:2025-certified production with batch-to-batch COA and statistical process control (Cpk ≥ 1.33). Semiconductor-grade lots include ICP-MS trace metal analysis down to 0.01 ppm.

• Supply reliability: Dual-sourced raw material streams and three regional blending/filling hubs (Asia, EU, NA). Safety stock maintained at ≥90 days of forecast demand.

• Logistics capability: UN 2924 Class 3 packing group II – compliant with IATA/IMDG. Expedited temperature-controlled shipping available (15–25°C).

• Price competitiveness: Direct-from-manufacturer model removes distributor markup. Contract pricing available for annual volumes ≥200 MT.

• Sustainability & documentation: Returnable drum programs reduce packaging waste by 70%. Full REACH, TSCA, and K-REACH compliance; SDS and technical datasheets provided digitally in 14 languages.

5. Commercial & Supply Information

• Minimum order quantity (MOQ): 200 kg (1 palletized 200L drum) for technical grade; 500 kg for semiconductor grade

• BULK 20MT loading capacity: 20 MT per ISO tank container (approx. 25,974 liters at 0.770 density)

• MT per standard 20-ft container (drums): 14.4 MT (72 × 200L drums, net weight)